METHOD FOR OBTAINING FILMS WITH MnGeO FERROMAGNETIC CLUSTERS ON THE SUBSTRATE IN THE GeO MATRIX Russian patent published in 2018 - IPC C23C14/18 C23C14/34 C23C14/58 H01L21/203 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to a method for producing films with ferromagnetic clusters Mn₅Ge₃O_x in the GeO matrix at low temperatures. Resulting Mn₅Ge₃O_x phase can be used as spintronics elements. Method comprises preparing a substrate, applying a layer of germanium-containing material and a manganese layer on it, and then annealing the resulting two-layer sample. As a germanium-containing substance, a layer of germanium monoxide is thermally deposited on the substrate. Prior to the deposition of the manganese layer, the substrate with a layer of germanium monoxide applied is cooled to room temperature. Annealing of the obtained sample is carried out at a temperature of 300 °C.

EFFECT: reduction in the number of process cycles and requirements for vacuum ambient due to a decrease in the Mn₅Ge₃O_x formation temperature (Nowotny phase) to 300 °C, while achieving high magnetic characteristics: M_s=600 emu/cm³, Tc=420 K, which leads to an increase in the functionality of Mn₅Ge₃O_x-GeO₂ film samples.

1 cl, 1 dwg