FIELD: technological processes.
SUBSTANCE: invention relates to production of plasma, namely to devices for generation of plasma using external electromagnetic fields and can be used for ion-plasma treatment of surfaces of various materials. Proposed device comprises vertical dielectric tube fitted in slot of dielectric flange with axial hole accommodating power electrode composed of solid copper rod so that its one end is rounded and arranged inside dielectric tube, and other end is beyond its limits and is electrically connected to high-frequency generator. In the lower part of the dielectric tube there is a main branch pipe oriented outwards tangentially. Above the main branch pipe, at the level of the rounded end of the power electrode, there is an additional branch pipe oriented outwards radially. External electrode from copper through a hole in its central part is placed on the additional branch pipe and is located with an air gap relative to external wall of the dielectric tube. Outer electrode is shaped to follow the shape of the outer wall of the dielectric tube. Cylinder filled with compressed gas is connected via pipeline via pipes to the main branch pipe and, via gas valve, to the additional branch pipe. Generator is connected in series to an ammeter and a relay connected to the gas valve and the generator.
EFFECT: wider range of equipment for similar purposes.
1 cl, 3 dwg
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Authors
Dates
2020-02-04—Published
2019-10-10—Filed