METHOD OF MODIFYING THE FOIL SURFACE FOR ELECTROLYTIC CAPACITORS Russian patent published in 2020 - IPC H01G9/45 B82B3/00 C23C14/32 

FIELD: electrical engineering.

SUBSTANCE: invention relates to electrical engineering and specifically to a method of modifying the surface of aluminum foil for an electrolytic capacitor, and can be used in radio electronic equipment, where miniaturization of equipment is required. Disclosed method comprises depositing, by electron-beam evaporation in vacuum on metal foil, of a coating consisting of a mixture of conductive and dielectric materials, wherein coating with open porosity and fractal micro- and nanostructures is obtained by electron-beam deposition. First, carbon is evaporated for its condensation in crystalline modification of graphite, for which photon treatment of surface is carried out, which is a sequence of intervals of irradiation with variable duration, wherein value of power supplied to substrate radiation is not less than 5 W/cm², duration of subsequent irradiation interval is equal to square root of duration of previous interval, duration between intervals remains invariable during entire time of carbon condensation, followed by depositing dielectric, which is aluminum, oxidized by process gas, which is fed into condensation zone.

EFFECT: increased specific capacitance and density of stored energy by electrolytic capacitor.

4 cl, 2 dwg, 1 ex