METHOD FOR CREATING GOLD NANOSTRUCTURES WITH SOLID BEAMS Russian patent published in 2023 - IPC C23C14/14 C23C14/18 C23C14/24 B82B3/00 B82Y30/00 

FIELD: microelectronics and nanoelectronics.

SUBSTANCE: invention relates to the field of technology of microelectronics and nanoelectronics, and in particular to a method for obtaining nanostructures with solid beams in the form of nanostars. Gold is condensed on the substrate by thermal evaporation in a vacuum unit. Condensation of gold on the same substrate is carried out in two stages: at the first stage, the substrate temperature is in the range from 10 to 40°C, the duration of condensation is 10–30 s, ensuring the condensation of two gold film monolayers. At the second stage, the condensation of gold on the substrate, which is cooled with liquid nitrogen, and the pulsed photon treatment (PPT) of the substrate surface in the ultraviolet spectrum are simultaneously continued. PPT pulses have a parabolically increasing duration. The intervals between pulses remain constant, the power of ultraviolet radiation at IPV ≤ 2 W/cm².

EFFECT: creation of time-stable nanoparticles in the form of gold nanostars with a controlled size, with weak adhesion to the substrate, without the use of expensive catalysts and costly technological operations.

6 cl, 2 dwg