FIELD: measurement.
SUBSTANCE: invention relates to measurement equipment and a method of measuring film thickness using a spectrophotometer. Method includes emitting a first light beam on a first film deposited on a substrate surface, and receiving, using a linear sensor, light reflected from the first film through the first gradient lens and the first linearly tunable filter. Method also includes using a second light source to emit a second light beam on a second film on the first film. Second linear sensor is used to receive light flux reflected from the second film and passed through the second gradient lens and the second linearly tunable filter. Obtained spectral reflectivity of the films is used to determine their thickness. Linearly tunable filters have a passband coating which varies along the length of the filter so as to shift the central wavelength of the filter linearly along its length.
EFFECT: technical result consists in enabling control of double-layer coatings and high quality of obtained coatings.
16 cl, 7 dwg
