METHOD AND DEVICE FOR TUNING HIGH-FREQUENCY PIEZOELECTRIC CELLS, INCLUDING WITH SMALL DIMENSIONS OF ELECTRODES (EMBODIMENTS) Russian patent published in 2020 - IPC H03H3/02 

FIELD: physics.

SUBSTANCE: group of inventions relates to production of piezoelectric elements, and can be used for group setting of frequencies of piezoelectric elements of different sizes (from 4.8 × 3.2 mm to 9 × 3.5 mm), including piezoelectric elements with small size of electrodes. Device comprises detachable base 1 and cover, to which are attached by means of guide pins 3 and screws mask for tuning frequencies of resonators 4, support plate 5, mounting plate 6. To cover are attached by means of guide pins 3 and screws: an external board, an intermediate board, a contact board, on which a mask for adjustment of resonator frequency separation is fixed. At that, in the adjustment method, the electrodes material layer is removed by ion etching. Device for tuning with high-frequency piezoelectric elements installed therein is placed into ion etching unit, air is evacuated to required vacuum values and supply of inert gas to plasmatrons is opened, lowering two shutter-dampers on side of mask to adjust frequencies of resonators 4, directing ion flow through holes 18 in mask for tuning frequencies of resonators 4 and changing frequency of both resonators of tunable high-frequency piezoelectric element by removing layer of material from surface of electrodes.

EFFECT: technical result is higher accuracy of tuning a group of high-frequency piezoelectric elements, including small ones.

7 cl, 6 dwg