FIELD: physics.
SUBSTANCE: invention can be used in making integrated piezoelectric devices (filters, resonators, delay lines on surface acoustic waves (SAW), which are widely used in avionics and on-board systems and telecommunications. The saturated fluorocarbon used is either tetrafluoromethane (CF4) or octafluoropropane (C3F8), or octafluorocyclobutane (C4F8), or octafluorocyclobutane (C10F18).
EFFECT: high yield due to reduced frequency dispersion in a batch of resonators, high stability of SAW resonators, high efficiency of the process owing to simultaneous single-piece treatment of evacuated resonators via reactive ion-beam etching in the gas discharge of a saturated fluorocarbon.
1 tbl
| Title | Year | Author | Number |
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| METHOD OF TUNING CENTRAL FREQUENCY OF RESONATORS ON THE BASE OF SURFACE ACOUSTIC WAVES | 1990 |
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