THIN-FILM TITANIUM THERMISTOR ON FLEXIBLE POLYIMIDE SUBSTRATE AND METHOD OF MANUFACTURE THEREOF Russian patent published in 2020 - IPC H01C17/06 

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument-making - fabrication of thin-film thermal resistors intended for discrete control of level and measurement of mass flow rate of fuel components. Thin-film titanium thermistor on a flexible polyamide substrate of rectangular shape, in the centre of which there is a film resistor in the form of a meander, on the edges of the short side there are contact pads in the form of wedges. Thermistor comprises successively deposited on a thin flexible polyamide substrate (1) layers of a thermic resistive layer of titanium (2), an adhesion sublayer of chromium (3), contact layer of copper (4), protective layer of chromium (5) and protective layer of lacquer, which is coated with meander (7), formed from thermistor layer of titanium (2). Method for manufacturing thin-film titanium thermistors on a flexible polyamide substrate involves successive sputtering on a thin dielectric substrate (1) of said layers (2)…(5). Further, selective photolithography with etching is performed in four stages in series to form thin-film thermoresistors in the form of meander (7). Then, substrate (1) is divided into separate thermoresistors, in each of which their copper contact pads (4) are coated with solder layer, soldered to individual printed-circuit board of sensor by Flip-chip technology and electric training of each thermistor is performed.

EFFECT: technical result is improved manufacturability and reduced costs in production of "spot execution" thermoresistors.

2 cl, 1 tbl, 6 dwg