RESISTANCE THERMOMETER Russian patent published in 2014 - IPC G01K7/16 

FIELD: physics.

SUBSTANCE: invention relates to microelectronics and can be used in instrument-making, in making film-type resistance thermometers with the temperature coefficient of resistance of platinum. Disclosed is a resistance thermometer having an insulating substrate, an adhesive layer made of high-melting metal, a thin-film sensitive element made of copper with thickness of 1.5-2.5 mcm, protective layers and terminal pads. The thin-film sensitive element and terminal pads are situated on the adhesive layer. The protection of the thermistor and contact pads is made of high-melting metal with thickness of 0.09-0.1 mcm with a 2-6 mcm overlapping region around the periphery of the elements and a layer of an inorganic dielectric in which "windows" are formed in the region of the terminal pads for contact units, where a current-conducting layer is deposited. The overlapping region of the current-conducting unit and the thermistor is 0.1-0.5 mm and 15-20 mcm on the rest of the periphery of the terminal pad. The thin-film sensitive element is made of copper with a nickel additive with concentration of 0.01-0.2% of the mass.

EFFECT: higher accuracy of measuring temperature.

3 dwg