TEMPERATURE-SENSITIVE ELEMENT Russian patent published in 2004 - IPC

Abstract RU 2222790 C2

FIELD: microelectronics, instrumentation engineering. SUBSTANCE: thin-film copper thermometer with protective layers of refractory material and inorganic coat is formed on adhesive layer of insulation substrate. Temperature-sensitive resistor comes in the form of multilayer structure Cr- Cu-Cr and has shape of meander. Thickness of chromium layer amounts to 0.05-0.06 mcm. EFFECT: generation of well-reproduced and stable value of temperature coefficient of resistance. 2 dwg

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RU 2 222 790 C2

Authors

Azhaeva L.A.

Klement'Ev A.T.

Kulikova S.V.

Sergeeva Z.N.

Khodzhaev V.D.

Dates

2004-01-27Published

2002-04-27Filed