FIELD: microelectronics, instrumentation engineering. SUBSTANCE: thin-film copper thermometer with protective layers of refractory material and inorganic coat is formed on adhesive layer of insulation substrate. Temperature-sensitive resistor comes in the form of multilayer structure Cr- Cu-Cr and has shape of meander. Thickness of chromium layer amounts to 0.05-0.06 mcm. EFFECT: generation of well-reproduced and stable value of temperature coefficient of resistance. 2 dwg
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Authors
Dates
2004-01-27—Published
2002-04-27—Filed