FIELD: microelectronics. SUBSTANCE: temperature sensitive element may also be used in instrument making, namely in manufacturing technology of resistance thermal converters. Temperature-sensitive element has thin-filmed copper thermistor with protective layers of high-melting metal and inorganic coating, and insulating substrate with adhesive layer. Thermistor contacts are made as multi-layer metal film areas. Thermistor is protected against environment by means of organic compound. Temperature-sensitive element provides for enhanced stability within temperature range of -200 to +200 C. EFFECT: improved design. 2 cl
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Authors
Dates
2000-10-27—Published
1999-11-04—Filed