THIN-FILM PLATINUM THERMISTOR ON GLASS SUBSTRATE AND METHOD OF MANUFACTURING THEREOF Russian patent published in 2020 - IPC H01C17/06 

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument-making, namely to thin-film platinum thermistors on glass substrates and methods for their production. Thermistors are designed for discrete level meters and can be used to control the level and mass flow rate of fuel components. Thin-film thermistor is located on dielectric substrate (1) of rectangular shape, on which in the centre there is a film resistor in the form of meander (2), and on edges of short sides of rectangular substrate contact pads (3) are located, which are connected to meander of thermistor in form of wedges. Rectangular and process rectangular areas (4) are placed on free from meander of thermistor and contact pads areas of substrate, distances between which are equal to gaps between strips of meander of thermistor. Substrate is made of glass (1) with thickness of 0.10…0.19 mm, length 4…6 mm, width 0.6…1.2 mm, square-wave (2) thermistor covers area (0.20 mm × 0.20 mm)…(0.4 mm × 0.4 mm). Meander (2) of thermistor, its contact pads (3) and rectangular process sites are made of platinum layer with thickness of 0.15…0.25 mcm, and the adhesive underlayer between the glass substrate and the platinum layer is a titanium layer with thickness of 0.01…0.02 mcm. Method of making thin-film platinum thermistors on glass substrates (1) involves successively depositing a sacrificial layer (photoresist) on a thin dielectric substrate, photoexposing, developing a pattern of the photoresist sacrificial layer, spraying the adhesive sublayer and the main layer - platinum (2), conducting reverse photolithography with removal of the sacrificial layer (photoresist) with films of the adhesive sublayer and the main platinum layer, leading to the formation of thin-film thermistors.

EFFECT: technical result is improved manufacturability and reduced costs in production of "set execution" thermistors.

2 cl, 8 dwg, 1 tbl