FIELD: target changers.
SUBSTANCE: invention relates to a target exchange device that is adapted to easily exchange targets used in the PVD method, and to a surface treatment apparatus that uses said device. The specified target replacement device is configured to replace targets. The targets are used to perform surface treatment with PVD, a surface treatment material in a reduced pressure space within the chamber. The device comprises a target holder, which is configured to hold the target, an attachment and detachment mechanism, which is configured to attach the target holder to the camera at a certain position in the reduced pressure space, in which the target is directed towards the material, the surface of which is being processed, and an isolation mechanism, which by opening isolates the target holder attached to the chamber from the reduced pressure space.
EFFECT: uniform coverage with ease of replacing targets during processing.
21 cl, 13 dwg
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