METHOD OF OBTAINING POLYCRYSTALLINE DIAMOND FILMS Russian patent published in 2021 - IPC C01B32/15 B82B3/00 B82Y40/00 C01B32/28 C23C16/27 B01F3/12 B01F11/02 B01J13/00 

FIELD: materials science.

SUBSTANCE: invention relates to the field of materials science and can be used in the manufacture of heat sinks, detectors of ionizing radiation, infrared windows, hardening and wear-resistant coatings on parts and cutting tools. First, a suspension containing nanodiamond powders is prepared and dispersed under ultrasonic action with a power of 500-1000 W. Then a substrate is placed in the suspension, for example, made of silicon or materials based on it, for deposition of nanodiamond powders on it under ultrasonic action with a power of 250-350 W. After that, a graphene layer containing 3-10 monolayers is deposited on the substrate. A polycrystalline diamond film is deposited onto a substrate by chemical vapor deposition (CVD), during which the graphene layer is etched off.

EFFECT: continuous homogeneous dense polycrystalline diamond film is obtained.

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