METHOD OF PROCESSING SUBSTRATES FOR GROWING NANOCRYSTALLINE LARGE-AREA DIAMOND FILMS Russian patent published in 2013 - IPC C23C18/12 B82B3/00 

Abstract RU 2471886 C1

FIELD: metallurgy.

SUBSTANCE: suspension of nano-diamond powder in spirit-containing fluid is made to be applied on substrate surface rotated for uniform distribution of said powder and acceleration of evaporation of said suspension. Said suspension is pre-cleaned. Powder of diamond nanoparticles sized to 5-100 nm is used for preparation of said suspension. Prior to applying suspension to substrate surface, thin layer of spirit-containing fluid is applied thereon to cover it completely. Said suspension is applied directly on said thin layer of spirit-containing fluid so that suspension covers completely the substrate surface. Amount of applied suspension is selected proceeding from equality of weight of nano-diamond powder in suspension and that of nano-diamond powder on substrate in thickness of one or three mean sizes of diamond nanoparticles in suspension, and concentration of said powder in spirit-containing fluid varying from 0.01% to 8%.

EFFECT: high density and uniformity of diamond growth centers on nondiamond substrates.

6 cl, 1 dwg

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RU 2 471 886 C1

Authors

Vikharev Anatolij Leont'Evich

Chernov Valerij Valer'Evich

Dates

2013-01-10Published

2011-07-20Filed