METHOD FOR TRANSFERRING GRAPHENE ONTO A POLYMER SUBSTRATE Russian patent published in 2021 - IPC H01L21/04 C30B29/02 B82Y40/00 

Abstract RU 2757239 C1

FIELD: electronics.

SUBSTANCE: invention relates to the field of creating processing of materials based on 2D structures, and in particular, the invention relates to the field of producing graphene-based conductive structures on a given carrier for electronics. The method for transferring graphene onto a polymer substrate includes applying a polymer film to the surface of graphene located on the initial substrate in order to create the "polymer/graphene/initial substrate" structure; spontaneously delaminating the "polymer/graphene" system from the surface of the initial substrate while cooling the "polymer/graphene/initial substrate" structure for no longer than 10 seconds in a medium of liquid nitrogen or helium in order to achieve a large temperature jump.

EFFECT: invention provides a possibility of transferring graphene onto a polymer substrate without additional structural defects with respect to the sample on the source surface, preserving the surface of the initial carrier for further use due to the absence of introduction of any structural changes thereto, as well as reducing the amount of waste water by 30 times compared to the basic "wet" methods.

7 cl, 5 dwg, 1 tbl, 11 ex

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RU 2 757 239 C1

Authors

Grebenko Artem Konstantinovich

Aitkulova Aisuluu Dzhanybekovna

Krasnikov Dmitrii Viktorovich

Nasibulin Albert Galiievich

Dates

2021-10-12Published

2020-05-22Filed