SEMICONDUCTOR GAS-SENSITIVE SENSOR Russian patent published in 2021 - IPC G01N27/14 

FIELD: gas-analyzers.

SUBSTANCE: invention relates to the analysis of materials, in particular for determining the content of hydrogen and hydrogen-containing gases and can be used in the manufacture of gas analyzers. The expected technical result is achieved in that the proposed semiconductor gas sensor, comprising: a substrate on one side of gas sensitive film, measuring electrodes placed on the gas sensitive film, the heater located on the opposite side of the substrate, while gas-sensitive tape is made of a material (In₂O₃)_0,45(Ga₂O₃)_0,45 (InGaO₃)_0,1.

EFFECT: increase in the sensitivity of the determination of hydrogen-containing gases 4÷10 times when the measurement range of concentrations of hydrogen-containing gases is expanded to 0.0001, vol. %, and simplification of the sensor design.

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