METHOD OF OBTAINING NANOSTRUCTURED GAS SENSOR FOR OZONE Russian patent published in 2018 - IPC G01N27/12 B82B3/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to technology for producing high-sensitivity resistive gas sensor for ozone based on oxide films in the system In₂O₃ – SnO₂. Method for obtaining a nanostructured gas sensor for ozone involves the joint crystallization of salt solutions or their coprecipitation, in this case, solutions of precursor salts are used as initial reagents (SnSO₄, In(NO₃)_3*xH₂O), oxide powders are obtained by the sol-gel method of co-crystallization and coprecipitation, after which the resulting powders are calcined at 120–400 °C and fired at 650 °C to obtain a solid solution based on In₂O₃ with the size of NPD ~ 27–29 nm, then a paste with an ethylcellulose-based binder [C₆H₇O₂(OH)_3-x(OC₂H₅)_x]_n and turpentine are made, and in the first series 10 % by weight of ethylcellulose and 5 ml of turpentine are added to the sample of the powder, and for the second series, the powder is mixed with 30 % by weight of ethylcellulose and 8 ml of turpentine, then, after vigorous stirring the resulting paste is applied to corundum substrates by screen printing, after which the samples are fired at 700 °C for 5 hours in the first stage and then at 1,100 °C for 3 hours.

EFFECT: technical result is an increase in the sensitivity of the sensor.

1 cl, 3 dwg