THERMAL IMAGER ON A CHIP OF A MONOLITHIC PHOTODETECTOR WITH OPTICAL OUTPUT (THERMAL IMAGING DYNAMIC VIDEO MIRROR) Russian patent published in 2022 - IPC H01L27/146 H01L21/782 

FIELD: optoelectronics.

SUBSTANCE: invention relates to optoelectronics, nano- and microelectronics and can be used to create a thermal imager with an optical output on a monolithic infrared (IR) or terahertz (THz) photodetector (PD) chip, including multispectral. The transformation or modification of the visualization spectrum of a sequence of images invisible to the eye is a promising scientific problem. A monolithic bodyless PD consisting of an array of n×m photodetectors (PD) to reduce the mass and dimensional characteristics, ensure microminiaturization and compactness of the design, expand the scope of application is made in the form of a multiplexer with additionally integrated arrays of photosensitive cells or PD and optical emitters. The invention can be used, for example, to create thermal imagers with optical output based on monolithic PD images of IR spectral ranges or on the basis of uncooled matrix micro-bolometric receivers of IR and THz radiation ranges.

EFFECT: application of the invention can provide an increase in the manufacturability of the thermal imager, simplification of the design of this thermal imager, simplification of the manufacturing technology, reduction of manufacturing complexity, reduction of weight and size characteristics, increase in the percentage of yield of usable products, cost reduction and expansion of the scope of thermal imagers on a monolithic PD chip with optical output.

3 cl, 8 dwg