MOSAIC PHOTODETECTOR WITH LIMITING EFFICIENCY OF IMAGE CONVERSION: STRUCTURES AND METHODS OF ITS MANUFACTURING (VERSIONS) Russian patent published in 2020 - IPC H01L27/146 

FIELD: electronics.

SUBSTANCE: invention relates to optoelectronics, nano- and microelectronics and can be used to create ultrahigh-dimensional mosaic photodetectors (MPD), including multispectral ones. In MPD of ultrahigh dimension with limiting efficiency of image conversion consisting of matrix n×m uncased photodetector submodules, to reduce the number of lost elements in the "blind zone", ensure compact design and expand field of use, uncased submodules are made with provision of minimum damage areas on jointed edges of crystals of submodules, submodules are arranged on a single carrier plate with minimum gaps or without gaps. Versions of jointing area of adjacent submodules and MPD in general are proposed. In method for manufacturing of ultrahigh-dimensional MPD with limiting efficiency of image conversion to increase accuracy of submodules positioning, improving manufacturability of the manufacturing method and reducing MPD prime cost additional precision formation of jointed edges of crystals of submodules with provision of minimum (5–8 mcm) damage areas is performed in a certain way, installation of submodules on a single carrier plate with holes is performed by means of vacuum grippers and micromanipulators with minimum gaps (≤2 mcm) or without gaps.

EFFECT: disclosed are versions of methods for creating MPD of ultrahigh dimension with limiting efficiency of image conversion; obtained results can be used when creating mosaic emitters consisting of a given combination of submodules-emitters of different ranges.

23 cl, 78 dwg, 1 tbl