METHOD FOR OBTAINING A MULTILAYER THERMODYNAMICALLY STABLE WEAR-RESISTANT COATING (OPTIONS) Russian patent published in 2021 - IPC C23C14/35 C23C14/06 

FIELD: material engineering.

SUBSTANCE: group of inventions (options) relates to the technology of applying thermodynamically stable and wear-resistant coatings and can be used in the machine-building, mining and oil industries, in tool and repair industries to harden the surface of tools and friction pairs, as well as to increase their thermodynamic stability when processing materials with low thermal conductivity, especially in cutting operations that cause an increase in temperature. According to one of the options, the method for obtaining a multilayer thermodynamically stable wear-resistant coating includes ion cleaning of the substrate and applying Zr_1-xAl_xN layers by magnetron sputtering, while ion cleaning of the substrate, a tool and/or the part in the tooling, is carried out with two arc evaporators with titanium cathodes for 5-15 minutes at a voltage of 700-800 V on the substrate, a pressure in the vacuum chamber Р=5.0·10^-3 with heating of the substrate to a temperature of 300-350°С, then a Ti sublayer is applied to the substrate by vacuum-arc evaporation and alternating layers of zirconium nitride and aluminum Zr_1-xAl_xN, where x=0.70 or 0.72, with a crystallite diameter of 30-50 nm and 60-100 nm by magnetron sputtering when controlling a magnetron sputtering system of four magnetrons with two zirconium targets and two aluminum targets by pulsed power sources at a bias voltage of 90-95 V on the substrate, while the Ti titanium sublayer is applied at a negative bias voltage of 250-280 V on the substrate, a pressure of 5.0·10^-3 Pa, a current on arc evaporators of 90-100 A, a cathode distance of - the substrate is 160-170 mm and the deposition temperature of the Ti sublayer is 300-350°С, and alternating layers of zirconium and aluminum nitride Zr_1-xAl_xN with a crystallite diameter of 30-50 nm and 60-100 nm are applied in a gas mixture of nitrogen and argon at a pressure of 0.7-0.75 Pa, the power is set on magnetrons with zirconium targets N_Zr=2.4-2.5 kW and with aluminum targets N_Al=2.7-2.8 kW, at the same time, when depositing a Zr_1-xAl_xN layer with a crystallite diameter of 30-50 nm, magnetron sputtering is carried out with two zirconium and two aluminum targets operating at a nitrogen content of 5-10% and a rotating substrate for at least 40-50 minutes, and when depositing a Zr_1-xAl_xN layer with a crystallite diameter of 60-100 nm, magnetron sputtering is carried out at a nitrogen content of 12-15% for at least 10-20 minutes, and the deposition of alternating layers is repeated at least twice and the top layer is applied as Zr_1-xAl_xN with a crystallite diameter of 30-50 nm, in this case, the layers are applied at a distance from the targets to the specified substrate equal to 140-150 mm, the substrate is fixed on the spokes that are satellites in the planetary mechanism of the substrate holder, the speed of rotation of the spokes is 20-25 rpm, and the substrate temperature is 200-250°С.

EFFECT: invention provides a coating with high wear-resistant, physical and mechanical, thermally stable properties and high adhesive strength of the sublayer with the substrate material and between the layers.

3 cl, 5 dwg, 1 tbl