METHOD FOR ION-BEAM TREATMENT OF THE INNER SURFACE OF EXTENDED HOLES Russian patent published in 2022 - IPC H01J37/317 C23C14/02 

FIELD: mechanical engineering.

SUBSTANCE: invention relates to mechanical engineering and can be used in processing the inner surface of extended holes of metal products or pipes to increase their surface hardness, corrosion resistance and wear resistance. The method for ion-beam treatment of the inner surface of the extended holes is carried out by generating a plasma flow, extraction and acceleration of ions, irradiation of the inner surface of the extended holes, movement of the workpiece along the longitudinal axis of the extended hole. The plasma ion stream is formed into a beam by ballistic focusing of ions on a fine-structured grid made in the form of a spherical segment in the drift space of a beam pre-filled with plasma. The product is positioned in the focal plane of the beam at a distance equal to the radius R of the spherical segment, and during ion treatment, the product is reciprocally moved along the beam axis at a distance equal to ± L/ 2, where L is the depth of the extended hole being processed.

EFFECT: expansion of the arsenal of methods for ion-beam treatment of the inner surface of extended holes, increasing the uniformity of processing.

1 cl, 4 dwg