FIELD: radiation physics. SUBSTANCE: ion source uses cylindrical coaxially extending anode, firing electrode, cathode holder, cathode made of concentric rings of working material snugging against one another, insulator electrically separating the cathode and fitting electrode, power supply of the main discharge with controllable pulse duration that is connected between the cathode external ring and anode. The firing electrode with insulator is installed in the center of the cathode. In the process of discharge arcing the cathode spot formed on the ring nearest to the firing electrode shifts towards the external ring, which results in a successive forming of plasma from different materials. EFFECT: simplified design. 1 dwg
Title | Year | Author | Number |
---|---|---|---|
ION SOURCE | 0 |
|
SU1395024A1 |
ION SOURCE | 0 |
|
SU1455926A1 |
METHOD OF PULSE-PERIODIC ION AND PLASMA TREATMENT OF PRODUCT AND DEVICE FOR ITS REALIZATION | 1996 |
|
RU2113538C1 |
DEVICE FOR SURFACE TREATMENT OF METAL AND METAL-CERAMIC ARTICLES | 2019 |
|
RU2725788C1 |
PLASMA EMITTER OF A PULSE FOREVACUUM ELECTRON SOURCE BASED ON AN ARC DISCHARGE | 2020 |
|
RU2759425C1 |
PLASMA SOURCE OF ELECTRONS WITH SYSTEM FOR AUTOMATIC IGNITION OF GLOW DISCHARGE IN HOLLOW CATHODE, OPERATING IN MEDIUM VACUUM | 2023 |
|
RU2816693C1 |
ACCELERATING GAP OF A PULSED FOREVACUUM ELECTRON SOURCE BASED ON AN ARC DISCHARGE | 2021 |
|
RU2758497C1 |
METHOD FOR ION-BEAM TREATMENT OF THE INNER SURFACE OF EXTENDED HOLES | 2022 |
|
RU2781774C1 |
METHOD OF ION IMPLANTATION | 1988 |
|
SU1565288A1 |
METHOD AND DEVICE FOR PULSE-PERIODIC ION TREATMENT OF ARTICLE | 1989 |
|
SU1764335A1 |
Authors
Dates
1994-09-15—Published
1988-01-25—Filed