METHOD FOR GENERATING LOW-TEMPERATURE PLASMA IN NARROW EXTENDED METAL TUBES Russian patent published in 2023 - IPC H01J37/317 C23C8/36 H01J37/34 

FIELD: plasma technology.

SUBSTANCE: invention relates to means for generating low-temperature plasma in long narrow metal tubes by means of a gas discharge in a medium vacuum. The generation method consists in igniting a non-self-sustained glow discharge with a hollow cathode, which is a metal tube. A non-self-sustained glow discharge is initiated and maintained by injection of a focused beam of accelerated electrons into the tube under medium vacuum conditions.

EFFECT: ensuring the generation of low-temperature plasma in the cavity of a tube with a transverse dimension of 8 to 15 mm and a length of up to 300 mm by igniting a non-self-sustained glow discharge with a hollow cathode, provided by injection of an accelerated electron beam into the cavity.

1 cl, 2 dwg, 1 ex