SMALL-SIZED RADIATION SOURCE EXCITED BY A BARRIER DISCHARGE Russian patent published in 2023 - IPC H01J65/00 

FIELD: radiation sources.

SUBSTANCE: sources of spontaneous radiation excited by a barrier discharge, which have a small cross section of the output beam ≈10 mm or less. A small-sized radiation source excited by a barrier discharge contains a flask made of a quartz tube and filled with an inert gas or its mixture with a halogen carrier. At one end of the flask there is an output window with high transparency at the operating wavelength, from the side of the output window the tubular flask is made flattened and on opposite sides of the flattened part of the flask there are electrodes at a minimum distance from each other, while the output window is made protruding above the flask, providing protection against surface breakdown.

EFFECT: increasing of the power density of short-wave radiation with a small cross section of the output beam.

1 cl, 1 dwg