GAS-DISCHARGE RADIATION SOURCE Russian patent published in 2015 - IPC H01J61/30 

FIELD: physics.

SUBSTANCE: gas-discharge radiation source with barrier discharge excitation includes a dielectric cylindrical flask with a gaseous medium, on the outer surface of which there are cylindrical electrodes which form a discharge gap in the flask, behind which, along an optical axis, there is a diaphragm with the next exit window for outputting radiation, located at a distance sufficient for concentrating radiation on the optical axis. Such an arrangement of components simplifies the design of the flask and enables to avoid the use of expensive materials when making the diaphragm.

EFFECT: easier ignition and longer service life of the working window and the device overall.

2 cl, 1 dwg