DEVICE FOR THICKNESS MEASUREMENT AND METHODS OF ITS APPLICATION Russian patent published in 2023 - IPC G01F23/26 

FIELD: measuring equipment.

SUBSTANCE: self-capacitance probing array sensor is comprised of a plurality of electrodes forming a self-capacitance probing array of capacitors, including one electrode acting as a drive electrode and a measuring electrode, wherein the change in capacitance at each electrode is independently measured to detect the type of material surrounding the electrodes; in this case, the electric field formed by the electrodes passes over the measurement plane and makes it possible to detect a change in the dielectric constant of the liquid surrounding the sensor.

EFFECT: increase in the accuracy and sensitivity of the probing matrix sensor.

20 cl, 54 dwg, 58 tbl