FIELD: pumping system.
SUBSTANCE: vacuum pumping system (300) with a reserve and a pumping method using this system, containing the main Roots pump (302), the first pumping subsystem (310) and the second pumping subsystem (320), wherein the first pumping subsystem (310) and the second pumping subsystem (320) is provided for parallel pumping of gas pumped out by the main Roots pump (302), the first pumping subsystem (310) containing the first auxiliary Roots pump (311), the first injection pump (312) and the first valve (313) located between the outlet (302b) for gas ejection of the main Roots pump (302) and the inlet (311a) for gas suction of the first auxiliary Roots pump (311), and the second pumping subsystem (320) containing the second auxiliary Roots pump (311), the second injection pump (312) and a second valve (323) located between the main Roots pump (302) gas outlet (302b) and the second auxiliary Roots pump (321) gas inlet (321a).
EFFECT: first pumping subsystem (310) and the second pumping subsystem (320) are configured to pump at the same flow rate, and the main Roots pump (302) is configured to pump at a flow rate F equal to the pumping flow rate of the main pumping subsystem (310) plus the pumping flow rate of the auxiliary pumping subsystem (320).
14 cl, 3 dwg
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Authors
Dates
2023-05-23—Published
2019-12-04—Filed