SENSITIVE ELEMENT OF CAPACITIVE MICROMECHANICAL PRESSURE SENSOR Russian patent published in 2023 - IPC G01L9/12 B81B3/00 

FIELD: sensors.

SUBSTANCE: invention relates to capacitive micromechanical sensors for absolute and gauge pressure of gases and liquids. A sensitive element of a capacitive micromechanical pressure sensor comprises a membrane that deforms under pressure and acts as a movable electrode, a base on which the membrane is fixed, and a cover on which a fixed electrode is located. The membrane is formed in a structural layer of single-crystal silicon with low resistivity and is completely isolated from the bulk of the material of the structural layer by means of an annular trench. The base and cover are made of high resistivity monocrystalline silicon. The stationary electrode is in the form of a thin metal film.

EFFECT: increasing the dynamic range of the pressure sensor by reducing the noise level of the processing circuit as a result of minimizing the parasitic capacitances of the sensing element.

1 cl, 5 dwg