FIELD: metrology of optical devices.
SUBSTANCE: invention relates namely to the adjustment and calibration of optical detectors. The method for adjusting an optical detector device includes setting the device lens in coordination with the optical world containing a solid body with a fluorescent material; the installation operation includes: matching the position of the lens with a section of the grating, with a microstructure located above the optical world, and focusing the exciting radiation at the first focal point on the microstructure, matching the position of the lens with the area, without a grating and microstructure, focusing the exciting radiation at the second focal point located below the upper surface of the optical target; excitation radiation is directed to the optical world; detecting, as reference information, fluorescence emission from the optical target; using said reference information to perform optical alignment and/or instrument calibration.
EFFECT: simplification of accurate calibration, adjustment and validation of the optical detector system.
9 cl, 10 dwg, 2 tbl
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Authors
Dates
2023-07-24—Published
2017-12-11—Filed