MICROELECTROMECHANICAL SWITCH Russian patent published in 2023 - IPC B81B7/02 H01P1/10 H01H59/00 

FIELD: microelectromechanical systems.

SUBSTANCE: microelectromechanical switches. The effect is achieved by the proposed switch containing a microscopic movable element in the form of a plate located between two fixed plates, on the surfaces of these plates facing each other there are plates of capacitors of electrostatic motors and electrical contacts - three on each surface, the movable plate moves under the action of voltage applied to the plates of these capacitors, and is fixed in one of two states due to the van der Waals forces of molecular attraction of the contacts, thus performing the function of a bistable electrically controlled element, i.e. trigger that retains its state regardless of the power source.

EFFECT: high level of microminiaturization, increased speed and reliability.

1 cl, 11 dwg