FIELD: microanalysis.
SUBSTANCE: quantitative analysis of materials using scanning electron microscopy (SEM), in particular method for preparing a glassy sample for electron probe microanalysis of the chemical composition. The method includes applying a conductive coating to the surface of a sample and ensuring electrical contact of the sample coating with a conductive sample stage. Moreover, the conductive coating of the sample is carried out by rubbing graphite onto a pre-polished glass surface.
EFFECT: increasing the productivity of the process for preparing a dielectric sample for microprobe analysis on an SEM.
2 cl, 1 dwg, 2 tbl, 4 ex
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| AUTOMATED SAMPLE PREPARATION | 2012 |
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| METHOD OF PREPARATION OF SAMPLES FOR INVESTIGATION | 1992 |
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