FIELD: production methods.
SUBSTANCE: it is done the preliminary polishing of the processing detail and done the physical-mathematical analysis. With the result of the analysis it is changed the polishing conditions from elemental contain of the detail surface layer, its stage condition and macrostructure. The mentioned parameters are defined by analysis of microdevice complex. It is includes the realization of x-ray stage analysis and slicing angel, x-ray photo-electrical spectroscope, mass-spectrometer and secondary ions with each layer analysis. At the same it is done the dimension of the micro-hardiness and roughness of processing surface.
EFFECT: it is increased the quality of processing surface.
1 tbl,1 ex
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Authors
Dates
2008-05-10—Published
2003-05-05—Filed