FIELD: flexible electronics.
SUBSTANCE: invention is aimed at an increase in the reliability of the heating element and the manufacturability of its manufacture while maintaining high heating quality. It is achieved by the fact that for the manufacture of a film heating element, a base is obtained, which is a polymer film made of a polymer material with a thickness of 10-20 microns with an array of end-to-end, essentially identical intersecting cylindrical channels with a diameter of 20-2000 nm, a surface density of 107-109 cm-2 located at an angle to each other. A conductive material is applied to the surface of one of the large sides of the base to form an auxiliary layer 50-100 nm thick on its surface. The base channels are filled on the side opposite to the auxiliary layer with conductive material through controlled electrochemical deposition, forming an array of intersecting long elements. The auxiliary layer of conductive material is removed from the surface of the base. Contact pads made of conductive material are formed on the surface of at least one of the large sides of the base.
EFFECT: increase in the reliability and manufacturability of the heating element while maintaining high heating quality.
7 cl, 2 dwg
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Authors
Dates
2023-12-18—Published
2022-10-11—Filed