METHOD FOR MANUFACTURING SERS-ACTIVE SUBSTRATE Russian patent published in 2023 - IPC H01L21/77 G01N21/65 

FIELD: nanostructured materials.

SUBSTANCE: invention relates to the field of technology for creating nanostructured materials for ultrasensitive diagnostics of the composition and structure of organic substances by SERS spectroscopy. To manufacture a SERS-active substrate, a template is obtained, which is a polymer film 10-20 μm thick with an array of through, essentially identical cylindrical channels with a diameter of 20-2000 nm, a surface density of 105-109 cm^-2. A plasmonic conductive material is applied to one of the large sides of said template to form a continuous layer 50-100 nm thick on its surface. Then a layer of metal 10-20 µm thick is applied over it by means of galvanic deposition to form a base. Said channels of said template are filled from the side opposite from the base with plasmonic material by means of controlled electrochemical deposition. Said template is removed to form an array of ledges on said base.

EFFECT: obtaining a SERS-active substrate with an optimal combination of mechanical and optical characteristics while improving the manufacturability of its manufacturing process.

5 cl, 1 dwg