DUAL-AXIS MICROMECHANICAL ACCELEROMETER WITH CAPACITIVE DISPLACEMENT TRANSDUCER Russian patent published in 2023 - IPC G01P15/00 

FIELD: measuring technology.

SUBSTANCE: invention is intended for measuring linear accelerations along two mutually orthogonal axes by measuring the electrical capacitance of capacitors formed by a movable electrode on an inertial mass and a stationary electrode on a stationary base. A two-axis accelerometer comprises single-axis accelerometers made in the form of a frame, to which an inertial mass is connected through elastic suspensions, the accelerometer is equipped with comb capacitors, and the capacitors with resistors form a resistive-capacitive bridge connected to a direct current source, and the bridge is switched by transistors controlled by a quartz oscillator. The accelerometer differs in that the suspension of the inertial mass to the frame is made of two S-shaped elastic elements and two single-axis accelerometers are placed in a stack one above the other, and the voltage is from two capacitors, the capacitance of which varies in different directions, and connected to the first inputs of two comparators, the second inputs of which are connected to the reference voltage, and the outputs of the comparators are connected to the two inputs of the “exclusive or” logical element, the output of which is connected to the current amplifier and, in the form of a duty cycle of pulses, carries information about acceleration along the line through one of the channels, and the converter board is placed on the inertial mass.

EFFECT: increase in the accuracy of converting the difference in capacitances without complicating the converter circuit.

1 cl, 3 dwg