INTEGRATED MICROMECHANICAL ACCELEROMETER GYROSCOPE Russian patent published in 2009 - IPC G01C19/56 G01P15/14 

FIELD: physics.

SUBSTANCE: in device, containing two inertial masses forming parallel-plate capacitors with electrodes of capacitive transformers of travels at the expense of their full overlapping, and immobile electrodes, with edge structures, forming electrostatic interaction with the immobile electrodes of electrostatic drive units twenty four additional electrodes of capacitive transformers of the travels forming with inertial masses parallel-plate capacitors at the expense of partial overlapping of combs interpenetrating each other of electrodes, and four additional mobile electrodes of electrostatic drive units are entered into the planes of their plates through lateral backlashes and combs of electrodes interpenetrating each other.

EFFECT: possibility of measuring quantities of angular velocity and acceleration along axes X and Y, located crossly perpendicularly in substrate plane, and axis Z guided perpendicularly the substrate plane.

2 dwg