INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER Russian patent published in 2013 - IPC G01P15/125 

FIELD: measurement equipment.

SUBSTANCE: device containing a semiconductor substrate with two supports, inertia mass, two torsions, two flexible beams and a movable electrode is provided with eight additional supports, an inner frame made from semiconductor material and located with a gap relative to the substrate, two additional torsions located with a gap relative to the semiconductor substrate, three additional movable electrodes, twelve additional flexible beams located with a gap relative to the semiconductor substrate, four fixed electrodes with comb structures on one side, which are made from semiconductor material and located immediately on the substrate; at that, movable electrodes have comb structures on one side and form capacitors with fixed electrodes with comb structures on one side in the plane of their plates through lateral gaps and which penetrate into each other by means of combs of electrodes.

EFFECT: invention ensures the possibility of measuring angular speed value along axis Z directed perpendicular to the substrate plane and acceleration value along axes X, Y located in the substrate plane of gyroscope-accelerometer.

3 dwg