INTEGRAL MICRO MECHANICAL GYROSCOPE-ACCELEROMETER Russian patent published in 2018 - IPC G01C19/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment and microsystems, more specifically to integral measuring elements of angular velocity and acceleration. Essence of invention consists in that the integrated micromechanical gyroscope-accelerometer additionally contains four movable electrodes of capacitive displacement transducers, eight additional stationary electrodes of capacitive displacement transducers, four additional movable electrodes of electrostatic actuators, nine additional fixed electrodes of electrostatic drives, eight "S"-shaped systems of elastic beams, made of a semiconductor material and located with a gap relative to the substrate, eight "U"-shaped systems of elastic beams, made of a semiconductor material and located with a gap relative to the substrate, and twenty-one additional supports made of a semiconductor material and located directly on the substrate, wherein two inertia masses have perforation, and the substrate and fixed electrodes of capacitance displacement transducers are made of semiconducting material.

EFFECT: technical result is the measurement of angular velocity values along the X and Y axes, located in the plane of the substrate, and Z axes, directed perpendicular to plane of the substrate, and values of linear acceleration along Χ, Y, and Z axes.

1 cl, 2 dwg