INTEGRATED MICROMECHANICAL ACCELEROMETER GYROSCOPE Russian patent published in 2009 - IPC G01C19/56 G01P15/14 

FIELD: physics.

SUBSTANCE: device contains inertial mass located with backlash concerning substrate with planar immobile electrodes located on it, two immobile electrodes with edge structures on one hand, and also two mobile electrodes of electrostatic drive units executed from semiconductor material in the form of plates with edge structures on the other hand and located with backlash concerning semiconductor substrate. Thus planar immobile electrodes form parallel-plate capacitors in plane of their plates through lateral backlashes with rectangular framework.

EFFECT: possibility of measuring quantities of angular velocity and acceleration along axes X and Y, located crossly perpendicularly in substrate plane, and axis Z guided perpendicularly the substrate plane.

2 dwg