FIELD: measuring equipment.
SUBSTANCE: invention relates to microsystems, particularly, to instruments for measuring linear acceleration. Accelerometer comprises substrate of dielectric material, anchor blocks fixed on substrate, inertial mass, Ω-shaped resilient elements forming suspension for decoupling in two orthogonal directions, outer frame, inside of which on Ω-shaped resilient elements of suspension are fixed intermediate frame, having elastic connection with inertial mass. Outer frame and inertial mass are equipped with comb electrodes, fixed parts of which are connected to substrate, movable electrodes form integral part with outer frame and inertial mass.
EFFECT: faster operation and accuracy of measuring acceleration, wider range of technical means enabling measurement of object acceleration in two mutually perpendicular directions.
1 cl, 1 dwg
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