VACUUM INSTALLATION FOR PRODUCTION OF MULTILAYER INTERFERENCE COATINGS ON OPTICAL ELEMENT Russian patent published in 2024 - IPC C23C14/56 C23C14/35 C23C28/00 

FIELD: optical engineering.

SUBSTANCE: vacuum installation for production of multilayer interference coatings on an optical element. The said installation contains a vacuum technological chamber with a frame inside, a holder for an optical element, at least two magnetrons with targets and a system for optical control of optical thickness of the coating. This installation additionally contains a device for shielding the working surfaces of targets, at least one plasma source and a heater for the optical element. The holder for the optical element is configured to secure the optical element so that the central axis of the said holder coincides with the central axis of the optical element. The planes of the working surfaces of the targets of the mentioned magnetrons are designed to be parallel to the plane of the front surface of the optical element and to provide distance X from the working surfaces of the targets to the front surface of the optical element, which is in the range of 150-450 mm. The said magnetrons are made with the ability to move on autonomous motion devices with the ability to change distance Y from the centre of the working surfaces of the targets to the axis of rotation of the holder. The system for optical control of the optical thickness of the formed multilayer interference coating has two emitters and two receivers.

EFFECT: production of multilayer interference coatings, which are suitable for production of high-precision optical products.

7 cl, 1 dwg, 1 ex