FIELD: physics.
SUBSTANCE: installation comprises a vacuum chamber, a magnetron, a tripod and a device mounted thereon for optically heating the substrate and adjusting its temperature, which comprises an anode-substrate holder for placing the substrate, a holder with at least two lamps mounted on it with integrated reflectors, regulator of a current of an incandescence and temperature of a substrate. The holder is fixed to a stand, mentioned lamps are connected to the regulator of the incandescent current and the temperature of the substrate and are located on its rear side. The anode-substrate holder contains a grid of thin molybdenum filaments for placing the substrate face-to-face magnetron.
EFFECT: device improvement.
7 dwg, 1 tbl, 4 ex
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