METHOD OF PRODUCING METAL-CONTAINING FILM WORKPIECE, METHOD OF COATING TARGET CARRIER WITH THIS METAL-CONTAINING FILM WORKPIECE (VERSIONS) AND USE THEREOF (VERSIONS) Russian patent published in 2024 - IPC C23C26/00 C23C28/00 G02B1/10 B32B37/14 B32B33/00 B82Y30/00 B82Y40/00 

Abstract RU 2813448 C1

FIELD: metallurgy.

SUBSTANCE: invention relates to a method of producing a metal-containing film workpiece. Technical result is achieved by method of producing metal-containing film workpiece (1) for application on target carrier (2), which includes a phase of formation of a multilayer composite structure (10), which includes metal film (100), and a phase of destruction of a multilayer composite structure (10) to obtain a metal-containing film workpiece (1). Phase of formation of multilayer composite structure (10) includes stages of application (E1) of underlying layer (101) on base (102) for formation of substrate (P) and metal sputtering (E2) on substrate (P) to form multilayer composite structure (10). Phase of destruction of multilayer composite structure (10) comprises steps of placing (S1) part of multilayer composite structure (10) into first liquid medium (M1) containing electrolyte, and destruction (S2) of underlying layer (101). Underlying layer (101) contains copper, and metal film (100) contains a metal from the group of noble metals. Phase of destruction of multilayer composite structure (10) further comprises steps of introducing (S3) inside first liquid medium (M1) of first electrode (3), forming (S4) anode by connecting first electrode (3) to positive pole (IA) of external source (I) of direct current, formation (S5) of the cathode by connecting underlying layer (101) to the negative pole (IK) of the external source (I) of direct current, electrolysis (S6) inside first liquid medium (M1) with formation of electrolytic gas bubbles, along edge (1010) of underlying layer (101), maintaining (S7) this electrolysis for mechanical separation of underlying layer (101) from base (102) by electrolytic gas bubbles, immersion (S8) of the multilayer composite structure (10) into the first liquid medium (M1) as underlying layer (101) is delaminated from base (102), up to complete separation of underlying layer (101) from base (102) and formation of sandwich structure (Z) containing underlying layer (101) and metal film (100), connected to each other.

EFFECT: obtaining a metal film workpiece with sufficient smoothness, continuity and cohesion, with sufficient transparency in the optical range of the visible light spectrum and high electrical conductivity.

19 cl, 9 dwg, 3 ex

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RU 2 813 448 C1

Authors

Arsenin Aleksey Vladimirovich

Volkov Valentin Sergeevich

Mironov Mikhail Sergeevich

Syuy Alexander Vyacheslavovich

Dates

2024-02-12Published

2022-12-26Filed