RADIO-FREQUENCY MICROELECTROMECHANICAL SWITCH (RF MEMS-SWITCH) WITH FLEXIBLE AND FREE MEMBRANE OF SWITCH Russian patent published in 2011 - IPC H01H1/00 H01H59/00 

FIELD: radio engineering.

SUBSTANCE: radio-frequency microelectromechanical switch (RF MEMS-switch) comprises a micromechanical switching device arranged on a substrate and made with the possibility of actuation between two positions: the first position (switched-off condition) and the second position (switched-on condition), and an activating device designed to put the switching device into the appropriate position. At the same time the micromechanical switching device comprises a flexible membrane (6) freely supported with a support device (3) and made with the possibility to bend under the action of the activating device (7) and freely slide relative to the support device (3) during its bending motion.

EFFECT: reliability improvement.

25 cl, 4 dwg