INTEGRATED MICROELECTROMECHANICAL SWITCH Russian patent published in 2019 - IPC H01H59/00 B81B7/00 

FIELD: radio engineering; electronics.

SUBSTANCE: invention relates to microsystem equipment and can be used in integrated electronics for signal switching. Technical result is achieved by introducing two electrostatic drives, first of which comprises capacitive switching element formed by two fixed lower electrodes of electrostatic drive, made of conductor material, located directly on substrate symmetrically on both sides of transmission line, a dielectric layer located on the surface of two fixed fuses and a transmission line, a movable electrostatic drive electrode divided into three component parts, wherein central part is connected to left and right part by means of two pairs of elastic suspensions, made in form of elastic beams of conductor material, each of the electrostatic drive movable electrode parts is made in the form of a plate with perforation from the conducting material and is located with a gap relative to the dielectric layer on the transmission line surface and two fixed safety devices, fixed on substrate by means of four support elements made of conductor material and located directly on grounding lines of coplanar waveguide, by means of elastic elements of suspension, made in form of elastic beams in the form of meander from conductor material, fixed upper electrode of electrostatic drive, made in form of plate with perforation from conductor material with applied on its surface transverse elastic beams of conductor material fixed on two support elements located directly on substrate, second electrostatic drive consisting of two movable electrodes of electrostatic drive, made of conductor material in form of comb structures on one side, arranged symmetrically on both sides of movable electrode of first electrostatic drive and fixed on support elements of movable electrode of first electrostatic drive by means of two pairs of elastic suspensions, made in form of elastic beams of conductor material and two resilient elements, made of conductor material and fixed directly to movable electrode of first electrostatic drive, two fixed electrodes of electrostatic drive, made of conductor material in form of comb structures on one side and located directly on the substrate on both sides of the movable electrodes of the second electrostatic drive with the possibility of electrostatic interaction with them in the plane of their plates through side gaps and interpenetrating each other by combs of electrodes.

EFFECT: commutation of centimeter wave range signals with low insertion loss, low inductance, low bias voltage, short switching time from one state to another, elimination of sensitivity to vibrations, external accelerations, exclusion of arbitrary actuation of the switch during switching of signals of high power, increase of rigidity of the structure of the upper electrodes of the electrostatic drive.

1 cl, 2 dwg