METHOD FOR SYNTHESIS OF MULTILAYER COATINGS ON ARTICLES USING SYNCHROTRON RADIATION Russian patent published in 2024 - IPC C23C14/06 C23C14/28 G01N23/20 G01L1/25 

FIELD: spraying or atomising.

SUBSTANCE: invention can be used for synthesis of heat-resistant, corrosion-resistant multilayer coatings consisting of alternating solid, superhard nitride and oxide layers on articles for aerospace, nuclear and machine building. Processed item is placed in the vacuum chamber sputtering zone, while simultaneously placing in this zone a control sample made from the material of the processed item with the same initial roughness of the surface (R_a) as the roughness of the item. Chamber is evacuated to the limit pressure of 10^-2 Pa, after which an electric potential of 800 V, which is negative relative to the chamber walls, is applied to the processed article and the reference sample. Before sputtering, cleaning, chemical activation of the surface of the treated article and reference sample and their heating to sputtering temperature −400 °C. Subsequent sputtering of alternating oxide and nitride layers of coating is carried out by vacuum ion-plasma method using two arc evaporators with titanium and aluminium cathodes. First, adhesion titanium sublayer with thickness of about 100 nm is deposited in argon atmosphere at pressure of 0.3 Pa. Then, 80–120 nm-thick TiAlN layers are sputtered with nitrogen-argon mix and TiAlO 2–3 mcm-thick layers using oxygen-argon mix. During sputtering of each coating layer, X-ray diffraction patterns are periodically taken by means of a beam of synchrotron radiation to control the value and the sign of the threshold voltage in the coating on the reference sample at photon energy and synchrotron radiation intensity of (1–40) keV and 0.5⋅10⁸ ph/(sec⋅mrad²), respectively. Obtained X-ray patterns are used to determine the magnitude of the threshold voltage modulo not more than 5⋅10³ MPa. Sputtering of each layer is carried out until it reaches threshold voltage value of the same value, but with opposite sign, after which another layer is sprayed.

EFFECT: invention provides minimum total value of macrostresses in multilayer coatings with thickness of more than 100 mcm, which increases service life of products.

1 cl, 3 dwg