MULTI SENSOR GAS ANALYTICAL CHIP BASED ON POTASSIUM TITANATE AND METHOD OF ITS MANUFACTURE Russian patent published in 2017 - IPC G01N27/407 

FIELD: electricity.

SUBSTANCE: multi sensor gas analytical chip (MGC) includes a dielectric substrate with a formed set of coplanar strip electrodes, on top of which a matrix layer of potassium titanate whiskers of the general chemical formula K_xH_2-xTi_nO_2n+1, where x=0-2, n=4-8. Each pair of electrodes forms a sensor segment of the matrix layer of potassium titanate whiskers, the density of which is variable for different segments and which resistance varies under the influence of combustible gases at room temperature. According to the method of manufacturing a multi sensor gas analytical chip based on potassium titanate whiskers, the dielectric substrate is washed in an organic solvent and distilled water, dried under vacuum at a temperature of 60-100°C, a set of coplanar strip electrodes of noble metal 0.1-1 mcm in thickness and 50-200 mcm in width with a gap between the electrodes of 10-100 mcm is applied to the substrate surface by cathode and/or magnetron sputtering, a suspension of a potassium titanate whisker powder dispersed in distilled water with a concentration of 0.01-5% by weight is applied on top and the resulting structure is dried at room temperature for 24 hours.

EFFECT: creation of a multi sensor gas analytical chip based on the layer of potassium titanate whiskers, which makes it possible to analyze the form of the gas medium at room temperature, which leads to a significant reduction in the energy consumption of this type of devices and the expansion of its technical application.

5 cl, 9 dwg