ANALYSIS OF MATERIALS BY METHOD OF SECONDARY ION MASS SPECTROMETRY AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 1995 - IPC

FIELD: vacuum gaseous-discharge electronics. SUBSTANCE: invention refers to study and test of substances by way of detection of small concentrations of impurities in substances. Primary ion flux is directed on to analyzed target. Secondary ions are registered with mass spectrometer. Molecular flux controlled by value is directed from cell of chemically active gas into vacuum chamber to analysis zone. Then gas is absorbed to obtain total pressure in area of sample by an order lower than in the whole of chamber. Controlled partial pressure is maintained in accord with mathematical relation given in formula of invention. Device for implementation of method has analytic chamber 1, sample 2 for analysis, ion source 3, mass spectrometer 4, pump 5, Knudsen cell 6, heater 7, thermocouple 8, gas absorber 9, heater 10, thermocouple 11, electron thermal emitter 12, power supply unit 13 and differential amplifier 14. EFFECT: increased sensitivity of analysis of materials, authenticated reproducibility of results of analysis. 2 cl, 2 dwg