PRODUCTION OF ALLOYS DIAMOND Russian patent published in 2015 - IPC C30B25/00 C30B31/20 H01L21/268 C30B29/04 C23C16/27 

FIELD: process engineering.

SUBSTANCE: invention relates to production of alloys diamonds to be used in electronics and instrument making s well as jewellery stones. Alloyed diamond is produced by chemical deposition of gas phase on substrate in reaction chamber 2. Alloying solid-state component 7 is placed in alloying chamber 3. The latter has at least three connection flanges. Two of them are designed to connect alloying chamber 3 with working gas feed line 1 while third flange allows passage of pulsed laser radiation 8 via translucent window 5 into alloying chamber 3 for sputter of alloying component 7. Note here that alloying component concentration in diamond is adjusted by varying the laser parameters: laser diode pump current, laser pulse frequency and distance from laser radiation focus to alloying component surface. Working gas can be composed of the mix of hydrogen and methane at the ratio of 98:2% to 90:10%. Additionally, oxygen can be added thereto.

EFFECT: precise alloying in the wide range of concentrations (10¹⁴ atom/cm³ to 9×10¹⁹ atom/cm³) of boron, sulphur and silicon.

3 cl, 1 dwg, 4 tbl, 4 ex